Piezoelectric actuator, piezoelectric drive device, robot, electronic component transport apparatus, and printer

Abstract

A piezoelectric actuator includes a vibration portion, a support portion that is integrally configured with the vibration portion and supports the vibration portion, and a piezoelectric element that is disposed on the vibration portion. The piezoelectric element includes a piezoelectric film including columnar crystal grains extending in a thickness direction. When a thickness of the piezoelectric film is referred to as T [μm] and an average diameter of the crystal grains in the width direction is referred to as D [μm], T/D is within a range of 10 to 100. The thickness T of the piezoelectric film is larger than or equal to 2 μm. A standard deviation of diameters of the crystal grains in the width direction is less than or equal to 1.8 μm.

Dependencies are inferred from the claim text.