Back to results
US 2019/0103547 A1Published application
Ultrasonic transducer using aerogel as filler material
AssigneeOlympus Scientific Solutions Americas Inc.
InventorGalestan Mackertich-Sengerdy
Life of this patent
Estimating the term…
Abstract
Disclosed is an ultrasonic transducer and a manufacturing method thereof. The transducer comprises a piezoelectric composite array having an array of rigid posts made of a piezoelectric material, with kerf spaces between the posts filled with a low density aerogel material.
Claims25
An ultrasonic transducer comprising:
- a layer of ultrasonic composite having an emitting face and a non-emitting face, the layer of ultrasonic composite further comprising:
- an array of posts made of a piezoelectric material, each of the posts having two endings, one ending being a post connection surface and the other ending partially forming the emitting face, and, each of the posts being surrounded at least partially by neighboring posts separated by kerf spaces;
- and,
- a filler material filling the kerf spaces between the posts, wherein the filler material is an aerogel material;
- a layer of connection circuit having a first face with an array of conductive contacts, each conductive contact making electrical contact with a corresponding post connection surface;
- and
- a backing layer attached to a second face of the layer of connection circuit, the backing layer substantially preventing acoustic emission from the non-emitting face.
4 more elements
A method of manufacturing an ultrasonic transducer comprising the steps of:
- providing a layer of ultrasonic composite having an emitting face and a non-emitting face, which further comprises the steps of,
- forming an upper block section of a piezoelectric ceramic block to form an array of posts, leaving an unworked lower block section, wherein neighboring posts are separated by kerf spaces, the posts having top post surfaces and lower connections to the lower block section;
- filling the kerf spaces with a filler material comprising an aerogel precursor material, the filler material having a top filler surface after the filling;
- drying the filler material to form an aerogel filler material;
- removing the lower block section, thereby exposing bottom post surfaces and a bottom filler surface;
- providing a layer of connection circuit having a first face with an array of conductive contacts, each conductive contact making electrical contact with a corresponding post connection surface;
- and,
- providing a backing layer attached to a second face of the layer of connection circuit, the backing layer substantially preventing acoustic emission from the non-emitting face.
5 more elements
An ultrasonic composite array comprising:
- an array of posts made of a piezoelectric material, each of the posts being surrounded at least partially by neighboring posts separated by kerf spaces;
- and,
- a filler material filling the kerf spaces between the posts, wherein the filler material is an aerogel material.
Dependencies are inferred from the claim text.