Mim capacitor containing negative capacitance material
AssigneeQUALCOMM Incorporated
InventorsYe LU, Junjing BAO, Bin YANG
Life of this patent
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Abstract
A capacitor may include a first conductive layer forming a first capacitor plate, a second conductive layer forming a second capacitor plate, and a first insulating material on the first conductive layer. The first insulating material may include a positive capacitance material. The capacitor may further include a second insulating material disposed over the first insulating material and between the first insulating material and the second conductive layer. The second insulating material may include a negative capacitance ferroelectric material.
Claims17
A capacitor comprising:
- a first conductive layer forming a first capacitor plate;
- a second conductive layer forming a second capacitor plate;
- a first insulating material on the first conductive layer, the first insulating material comprising a positive capacitance material;
- and
- a second insulating material disposed over the first insulating material and between the first insulating material and the second conductive layer, the second insulating material comprising a negative capacitance ferroelectric material.
A metal oxide semiconductor (MOS) varactor comprising:
- a source region of a first polarity;
- a drain region of the first polarity;
- a channel region of the first polarity between the source region and the drain region, the channel region including a gate;
- a first insulating material on the gate, the first insulating material comprising a positive capacitance material;
- and
- a second insulating material disposed over the first insulating material and between the first insulating material and a conductive layer, the second insulating material comprising a negative capacitance ferroelectric material.
16-20. (canceled)
A capacitor comprising:
- a first conductive layer forming a first capacitor plate;
- a second conductive layer forming a second capacitor plate;
- an insulating material on the first conductive layer, the insulating material comprising a positive capacitance material;
- and
- means for increasing a capacitance of the capacitor, disposed between the insulating material and the second conductive layer.
Dependencies are inferred from the claim text.