Electronic device including first substrate having first and second surfaces opposite from each other, second substrate facing first surface, and drive circuit facing second surface

An electronic device comprising:

• a first substrate having a first surface and a second surface opposite from the first surface, the first substrate having a thickness defining a thickness direction;
• a second substrate facing the first surface;
• a plurality of driven elements provided at the second substrate and arrayed in a first direction orthogonal to the thickness direction;
• a drive circuit facing the second surface and capable of outputting drive signals for driving the plurality of driven elements;
• a first interconnect provided at the first surface and extending in the first direction;
• a second interconnect provided at the second surface and extending in the first direction, the second interconnect being electrically connectable to an external terminal;
• a plurality of through-substrate interconnects penetrating the first substrate in the thickness direction and electrically connecting the first interconnect and the second interconnect;
• a plurality of first connection bumps electrically connecting the first interconnect and the plurality of driven elements;
• and
• a plurality of second connection bumps electrically connecting the second interconnect and the drive circuit,
• wherein a combined electrical resistance of the plurality of through-substrate interconnects is lower than a combined electrical resistance of the plurality of second connection bumps.