Holding apparatus

A holding apparatus for rotatably holding, while cooling, a to-be-processed object in a vacuum chamber, comprising:

• a stage on which the to-be-processed object is placed, a rotary drive means for rotatably supporting the stage, and a cooling means for cooling the stage;
• wherein, provided that a stage surface side on which the to-be-processed object is placed in position is defined as an upside, the rotary drive means has:
• a tubular rotary shaft body which is mounted on a wall surface of the vacuum chamber, in a penetrating manner, through a first vacuum seal;
• a connection member for connecting an upper end part of the rotary shaft body and a lower surface of the stage in a manner to define a space below the stage;
• and a driving motor for driving to rotate the rotary shaft body;
• wherein the cooling means has:
• a cooling panel disposed in the space in a manner to face, with a clearance to, the lower surface of the stage;
• a heat transfer shaft body which is inserted into an inside of the rotary shaft body in a manner to come into contact with the lower surface of the cooling panel;
• and a refrigerator for refrigerating the heat transfer shaft body.