Integrated Circuit Fabrication System with Adjustable Gas Injector
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYung-Shun Hsu, Ching-Yu Chang, Chiao-Kai Chang, Wai Hong Cheah, Chien-Fang Lin
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Abstract
The present disclosure provides a semiconductor fabrication apparatus. The semiconductor apparatus includes a processing chamber; a substrate stage provided in the processing chamber and being configured to secure and rotate a semiconductor wafer; a gas injector configured to inject a chemical to the processing chamber; a window attached to the gas injector; and an adjustable fastening device coupled with the gas injector and the window.
Claims21
A semiconductor fabrication apparatus, comprising:
- a processing chamber;
- a substrate stage provided in the processing chamber and being configured to secure and rotate a semiconductor wafer;
- a gas injector configured to inject a chemical to the processing chamber;
- a window attached to the gas injector;
- and
- an adjustable fastening device coupled with the gas injector and the window.
A semiconductor fabrication apparatus, comprising:
- a processing chamber;
- a substrate stage configured in the processing chamber and being operable to secure and rotate a semiconductor wafer;
- a gas injector attached to the processing chamber and designed to inject a chemical to the processing chamber;
- an O-ring provided to the gas injector;
- a window attached to the gas injector and in direct contacting with the O-ring;
- a gas injector cover disposed on the window;
- and
- an adjustable fastening device integrated with the gas injector and designed to secure the window and the gas injector cover to the gas injector with an adjustable height.
18-20. (canceled)
A semiconductor fabrication apparatus, comprising:
- a processing chamber;
- a substrate stage configured in the processing chamber and being operable to secure and rotate a semiconductor wafer;
- a gas injector attached to the processing chamber and designed to inject a chemical to the processing chamber;
- a window attached to the gas injector;
- a gas injector cover disposed on the window;
- and
- an adjustable fastening device integrated with the gas injector and designed to secure the window and the gas injector cover to the gas injector with an adjustable height.
Dependencies are inferred from the claim text.