Apparatus and method for treating substrate
AssigneeSemes Co., Ltd.
InventorJUDONG LEE
Life of this patent
Estimating the term…
Abstract
Provided are an apparatus and a method for supplying a liquid. An apparatus for treating a substrate includes a substrate support unit to support the substrate, and a liquid supplying unit to supply a liquid to a substrate supported by the substrate support unit. The liquid supplying unit includes a nozzle to discharge the liquid, a liquid supplying line to supply the liquid to the nozzle, a constant pressure valve installed on the liquid supplying line, a shut-off valve installed on the liquid supplying line while being interposed between the constant pressure valve and the nozzle to supply the liquid or to stop the supply of the liquid, and a controller to control the constant pressure valve and the shut-off valve.
Claims9
An apparatus for treating a substrate, the apparatus comprising:
- a substrate support unit to support the substrate;
- and
- a liquid supplying unit to supply a liquid to a substrate supported by the substrate support unit,
- wherein the liquid supplying unit includes:
- a nozzle to discharge the liquid;
- a liquid supplying line to supply the liquid to the nozzle;
- a constant pressure valve installed on the liquid supplying line;
- a shut-off valve installed on the liquid supplying line while being interposed between the constant pressure valve and the nozzle to supply the liquid or to stop the supply of the liquid;
- and
- a controller to control the constant pressure valve and the shut-off valve, and
- wherein the controller performs a control operation such that the shut-off valve is closed and the constant pressure valve is closed when the discharge of the liquid of the nozzle is stopped.
A method for performing liquid treatment for a substrate, the method comprising:
- supplying a liquid to the substrate by a nozzle as the nozzle is connected with a liquid supplying line having a constant pressure valve and a shut-off valve sequentially mounted on the liquid supplying line in a direction that the liquid is supplied;
- and
- opening the constant pressure valve when the shut-off valve is closed as supply of the liquid from the nozzle is completed.
Dependencies are inferred from the claim text.