Temperature control method
AssigneeTokyo Electron Limited
InventorJun Young CHUNG
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Abstract
A temperature control method of controlling a temperature of an object to be processed includes supplying a heat-transfer gas between an object to be processed and a mounting stage from a gas port from among a plurality of gas ports provided in a mounting stage, exhausting the heat-transfer gas from another gas port different from the gas port, detecting pressure of the gas port supplying the heat-transfer gas and the another gas port exhausting the heat-transfer gas, and adjusting the pressure.
Claims7
A temperature control method of controlling a temperature of an object to be processed, the temperature control method comprising:
- supplying a heat-transfer gas between an object to be processed and a mounting stage from a gas port from among a plurality of gas ports provided in a mounting stage;
- exhausting the heat-transfer gas from another gas port different from the gas port;
- detecting pressure of the gas port supplying the heat-transfer gas and the another gas port exhausting the heat-transfer gas;
- and
- adjusting the pressure.
A temperature control method of controlling a temperature of an object to be processed mounted on a mounting stage, the temperature control method comprising:
- forming a flow of a heat-transfer gas in a horizontal direction between the object to be processed and the mounting stage;
- detecting pressure of the flow of the heat-transfer gas on an upstream side and a downstream side;
- and
- adjusting the pressure.
Dependencies are inferred from the claim text.