Charged Particle Beam Device
AssigneeHitachi High-Technologies Corporation
InventorsToshiyuki YOKOSUKA, Chahn LEE, Hideyuki KAZUMI, Hajime KAWANO
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Abstract
There is proposed a charged particle beam device that generates a first signal waveform on the basis of scanning, the number of scanning lines of which is one or more, the scanning intersecting an edge of a pattern on a sample, generates a second signal waveform for a first area that is wider than the one scanning line on the basis of scanning, the number of scanning lines of which is larger than that of scanning for generating the first signal waveform, then determines a deviation between the generated first and second signal waveforms, and thereby determines, from the deviation, correction data used at the time of dimensional measurement.
Claims9
A charged particle beam device comprising:
- a scanning deflector that scans a charged particle beam emitted from a charged particle source;
- a detector that detects a charged particle obtained on the basis of scanning of the charged particle beam applied to a sample;
- a computing device that generates a signal waveform on the basis of an output of the detector, and computes pattern dimensions of a pattern formed on the sample by using the signal waveform;
- and a control device that controls the scanning deflector,
- wherein when the control device controls the scanning deflector to perform scanning, the number of scanning lines of which being one or more, for a first region intersecting an edge of the pattern on the sample, the computing device generates a first signal waveform on the basis of the charged particle detected by the detector,
- when the control device controls the scanning deflector to perform scanning, the number of scanning lines of which being larger than that at the time of scanning the first region, for a first area that includes the first region, and that is wider than the first region, the computing device generates a second signal waveform on the basis of the charged particle detected by the detector, and
- the control device determines a deviation between the generated first and second signal waveforms.
A storage medium for storing a computer program that causes a computer to measure dimensions of a pattern to be measured on the basis of a measurement signal waveform obtained by a charged particle beam device, and that can be read by the computer,
- the program causing the computer to:
- obtain a plurality of first signal waveforms obtained by performing scanning, the number of scanning lines of which is one or more, at a plurality of positions on a sample on which the pattern is formed, and image data obtained by beam scanning for an area that includes the plurality of positions;
- determine deviations of respective obtaining positions of the first signal waveforms at the plurality of positions from respective positions corresponding to obtaining positions of the first signal waveforms on the image data by comparing the first signal waveforms with second signal waveform data extracted from the image data;
- and generate, from the deviations at the plurality of positions, measurement-value correction data that uses the measurement signal waveforms.
Dependencies are inferred from the claim text.