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AssigneeHitachi High-Technologies Corporation
InventorsMotohiro TAKAHASHI, Masaki MIZUOCHI, Shuichi NAKAGAWA, Tomotaka SHIBAZAKI, Hironori OGAWA, Naruo WATANABE, Takanori KATO
Estimating the term…
The present invention is to provide a stage device capable of improving field-of-view positioning accuracy of a stage having a Z-axis mechanism. The invention is directed to a sample stage device having a first table (105) that moves a sample in a first direction, a second driving mechanism (601) that moves the first table in a second direction different from the first direction, and a part having a function of moving a laser interferometer optical axis (115) that measures the position of the first table, in the second direction.
A stage device provided with a table loaded with a sample, a first driving mechanism moving the table in an X direction, a mirror mounted on the table, and a laser interferometer radiating a laser beam towards the mirror and receiving reflected light from the mirror to measure a position of the table in the X direction, the stage device comprising:
A charged particle beam device comprising:
Dependencies are inferred from the claim text.