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US 2019/0103220 A1Published application
Thin film capacitor
AssigneeTDK Corporation
InventorsMasahiro HIRAOKA, Hitoshi SAITA, Suguru ANDOH, Atsuo MATSUTANI
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Abstract
Provided is a thin film capacitor that includes: a first electrode layer having a principal surface in which a plurality of recesses are provided; a dielectric layer laminated on the principal surface of the first electrode layer; and a second electrode layer laminated on the dielectric layer. When a depth of the recess is defined as FL and a thickness of the dielectric layer is defined as T, H/T is 0.05 or more and 0.5 or less.
Claims8
A thin film capacitor comprising:
- a first electrode layer having a principal surface in which a plurality of recesses are provided;
- a dielectric layer laminated on the principal surface of the first electrode layer;
- and
- a second electrode layer laminated on the dielectric layer,
- wherein, when a depth of the recess is defined as H, and a thickness of the dielectric layer is defined as T, H/T is 0.05 or more and 0.5 or less.
2 more elements
Dependencies are inferred from the claim text.