US 2019/0102495 A1 · INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND PROGRAM

Abstract

The present technology relates to an information processing apparatus, an information processing method, and a program which enable analysis as to what a polishing progress shape looks like, with respect to an external force factor, a polishing object shape, and a material physical property value of a polishing object made up of a plurality of materials. Provided are an acquisition unit configured to acquire structure models corresponding to a second structure as an object to be polished by the first structure; a stress analysis unit configured to analyze a stress exerted on the second structure by the first structure; and a polishing response analysis unit configured to analyze a polishing state of the second structure. The present technology can be applied to an information processing apparatus that analyzes a state of progress of polishing in chemical mechanical polishing.

Claims12

Dependent claims

An information processing apparatus comprising:

an acquisition unit configured to acquire structure models corresponding to a first structure and a second structure as an object to be polished, which is to be polished by the first structure;
a stress analysis unit configured to analyze a stress exerted on the second structure by the first structure;
and
a polishing response analysis unit configured to analyze a polishing state of the second structure by converting a stress and an analyzed region into a region of a density distribution function through analysis by the stress analysis unit and performing analysis based on a diffusion equation.

1 more element

Dependencies are inferred from the claim text.

Information processing apparatus, information processing method, and program

Life of this patent

Information processing apparatus, information processing method, and program

Life of this patent

Abstract

Claims12