Generating risk inventory and common process window for adjustment of manufacturing tool
AssigneeGlobalfoundries Inc.
InventorsHongxin Zhang, Shaowen Gao, Norman Chen
Life of this patent
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AssigneeGlobalfoundries Inc.
InventorsHongxin Zhang, Shaowen Gao, Norman Chen
Estimating the term…
Methods according to the disclosure include: converting an image of a manufactured circuit to a plurality of representative contours, the plurality of representative contours corresponding to printed features in the manufactured circuit; generating a risk inventory for the manufactured circuit based on the plurality of representative contours, the risk inventory being configured to identify at least one process sensitive geometry (PSG) in the manufactured circuit; generating a common process window (CPW) for the manufactured circuit based on the plurality of representative contours and the risk inventory, the CPW being indicative of manufacturing reliability of each feature in the manufactured circuit; and generating instructions to adjust a manufacturing tool for creating the manufactured circuit, based on the generated CPW.
A method comprising:
A computer program product stored on a computer readable storage medium, the computer program product comprising program code, which, when being executed by at least one computing device, causes the at least one computing device to:
A system comprising at least one computing device configured to perform a method by performing actions including:
Dependencies are inferred from the claim text.