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US 2019/0101839 A1Published application
Substrate edge detection
AssigneeASML Netherlands B.V.
InventorsEric Anthony JANDA, Cayetano COBALEDA SÁNCHEZ-FABRÉS, Bernd Peter GEH, Simon Gijsbert Josephus MATHIJSSEN
Life of this patent
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Abstract
A method including directing, by an optical system, an illumination beam to a surface of a substrate, providing relative motion between the directed illumination beam and the substrate until the directed illumination beam is illuminated on a grating underneath an edge or a notch of the substrate, diffracting, by the grating, at least a portion of the illumination beam, and detecting, by the detector, the diffracted illumination.
Claims20
A method comprising:
- directing, by an optical system, an illumination beam to a surface of a substrate;
- providing relative motion between the directed illumination beam and the substrate until the directed illumination beam is illuminated on a grating underneath an edge or a notch of the substrate;
- diffracting, by the grating, at least a portion of the illumination beam;
- and
- detecting, by a detector, the diffracted illumination.
2 more elements
A method comprising:
- directing, by an optical system, an illumination beam to a surface of a substrate;
- providing relative motion between the directed illumination beam and the substrate until the directed illumination beam is illuminated on a structure underneath an edge or a notch of the substrate;
- redirecting, by the structure, at least a portion of the illumination beam with a redirection angle different than the incident angle;
- and
- detecting, by the detector, the redirected illumination.
2 more elements
A method comprising:
- directing, by an optical system, an illumination beam to a surface of a substrate;
- providing relative motion between the directed illumination beam and the substrate to transition the directed illumination from being incident on an interior of the substrate toward being no longer incident on the substrate until at least the directed illumination beam is incident on an edge or a notch of the substrate;
- redirecting at least a portion of the illumination beam by the substrate;
- and
- detecting, by a detector, essentially only 0th order redirected illumination,
- wherein the detector transitions from observing 0th order redirected illumination for the interior of the substrate and observing essentially no 0th order redirected illumination when the edge or notch is reached.
3 more elements
An apparatus comprising:
- a substrate stage configured to support a substrate;
- an optical system configured to direct an illumination beam to a surface of the substrate;
- a structure underneath an edge or a notch of the substrate when held by the substrate stage, the structure configured to scatter at least a portion of the directed illumination beam at a redirection angle other than the incident angle of the directed illumination beam to the structure;
- a detector configured to receive the scattered illumination beam from the structure;
- and
- an actuator configured to provide relative motion between the directed illumination beam and the substrate until the directed illumination beam is illuminated on the structure.
3 more elements
Dependencies are inferred from the claim text.