Chemical amplification type positive photosensitive resin composition, a photosensitive dry film, a method for producing a photosensitive dry film, a method for producing a patterned resist film, a method of manufacturing a template with a substrate, and a method of manufacturing a plated shaped product, and a mercapto compound

A mercapto compound represented by the following formula (C):

• wherein in the formula (C), n1 is an integer of 1 or more and 4 or less, n2 is an integer of 1 or more and 4 or less, Rc1 is an organic group having a valence of (n1+n2) and the Rc1 is bonded to a carbonyl group by a C—C bond, and bonded to a mercapto group by a C—S bond, and Rc is a monovalent organic group bonded to an oxygen atom by a C—O bond, and having any one of structures represented by the following formulae (c1) to (c4):
• in the group represented by the above-mentioned (c1), Rc2 and Rc3 are each independently a hydrogen atom or a monovalent organic group, in a proviso that at least one of Rc2 and Rc3 is a monovalent organic group having an aliphatic ring CL including a divalent group represented by —CO—O— in the ring structure, or a monovalent organic group having an aliphatic ring CS including a divalent group represented by —SO2— in the ring structure, or a monovalent organic group having an aliphatic ring CP including a trivalent group represented by the following formula in the ring structure:
• or Rc2 and Rc3 are bonded to each other to form an aliphatic ring CL, an aliphatic ring CS, or an aliphatic ring CP;
• in the group represented by the above formula (c2), Rc2 and Rc3 are each independently a hydrogen atom or a monovalent organic group, Rc4 is a hydrocarbon group, a carbon atom to which Rc2, Rc3 and Rc4 are bonded is a tertiary carbon atom, and Rc3 and Rc4 may be bonded to each other to form a ring, in a proviso that at least one of Rc2 and Rc3 is a monovalent organic group having an aliphatic ring CA including one or more divalent groups selected from a group consisting of an ether bond, a sulfide bond, and a carbonyl group in the ring structure, a monovalent organic group having an aliphatic ring CH substituted with a hydroxyl group or a hydroxyl group-containing group, a monovalent organic group having an aliphatic ring CL mentioned above as to the formula (c1), a monovalent organic group having an aliphatic ring CS mentioned above as to the formula (c1), or a monovalent organic group having an aliphatic ring CP mentioned above as to the formula (c1), or
• Rc2 and Rc3 are bonded to each other to form an aliphatic ring CA, an aliphatic ring CH, an aliphatic ring CL, an aliphatic ring CS, or an aliphatic ring CP;
• in the group represented by the above formula (c3), Rc2 and Rc3 are the same as Rc2 and Rc3 in the above formula (c2), Rc5, Rc6, and Rc7 are each independently a hydrogen atom, or an alkyl group, and Rc5 and Rc6 may be bonded to each other to form a ring, in a proviso that at least one of Rc2 and Rc3 is a monovalent organic group having an aliphatic ring CA, a monovalent organic group having an aliphatic ring CH, a monovalent organic group having an aliphatic ring CL, a monovalent organic group having an aliphatic ring CS, or a monovalent organic group having an aliphatic ring CP, or
• Rc2 and Rc3 are bonded to each other to form an aliphatic ring CA, an aliphatic ring CH, an aliphatic ring CL, an aliphatic ring CS, or an aliphatic ring CP;
• in the group represented by the above formula (c4), Rc8 is a divalent organic group, and Rc8 is bonded to a carbonyl group by a C—C bond, and is bonded to an oxygen atom by a C—O bond, and Rc0 is an acid dissociable group.

A compound represented by the following formula (C1-d) or (C1-f):

• wherein the formula (C1-d), Rc1 is an organic group having a valence of (n1+n2), and the Rc1 is bonded to a carbonyl group by a C—C bond, and bonded to a mercapto group by a C—S bond, Rc2 and Rc3 are each independently a hydrogen atom or a monovalent organic group, Xc is a group represented by Rx1—(C═O)—, Rx1 is a monovalent hydrocarbon group, n1 is an integer of 1 or more and 4 or less, and n2 is an integer of 1 or more and 4 or less, in a proviso that at least one of Rc2 and Rc3 is a monovalent organic group having an aliphatic ring CL including a divalent group represented by —CO—O— in a ring structure, a monovalent organic group having an aliphatic ring CS including a divalent group represented by —SO2— in a ring structure, or a monovalent organic group having an aliphatic ring CP including a trivalent group represented by the following formula in a ring structure:
• or Rc2 and Rc3 are bonded to each other to form an aliphatic ring CL, an aliphatic ring CS, or an aliphatic ring CP;
• in the formula (C1-f), Rc1 is an organic group having a valence of (1+n2), and the Rc1 is bonded to a carbonyl group by a C—C bond, and bonded to a sulfur atom by a C—S bond, Rc2 and R3 are each independently a hydrogen atom or a monovalent organic group, and n2 is an integer of 1 or more and 4 or less, in a proviso that at least one of Rc2 and Rc3 is a monovalent organic group having an aliphatic ring CL including a divalent group represented by —CO—O— in a ring structure, a monovalent organic group having an aliphatic ring CS including a divalent group represented by —SO2— in a ring structure, or a monovalent organic group having an aliphatic ring CP including a trivalent group represented by the following formula in a ring structure:
• or Rc2 and Rc3 are bonded to each other to form an aliphatic ring CL, an aliphatic ring CS, or an aliphatic ring CP.