Nanoimprint template with light blocking material and method of fabrication
AssigneeCanon Kabushiki Kaisha
InventorsAmir Tavakkoli Kermani Ghariehali, Edward Brian Fletcher
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Abstract
A nanoimprint lithography template, method of fabrication, and method of manufacturing an article using the same. The template includes a body having first and second opposed sides, the second side having a mesa extending therefrom, with the mesa having sidewalls and a surface. A recessed shelf extends around a perimeter of the mesa surface, with a light-blocking material positioned on at least the recessed shelf and at a thickness such that the light-blocking material does not extend beyond a plane defined by the mesa surface.
Claims20
A nanoimprint template comprising:
- a body having first and second opposed sides, the second side having a mesa extending therefrom, the mesa having sidewalls and a surface;
- a recessed shelf extending around a perimeter of the mesa surface, and
- a light-blocking material positioned on at least the recessed shelf at a thickness such that the light-blocking material does not extend beyond a plane defined by the mesa surface.
A method for fabricating a nanoimprint template, the method comprising;
- providing a nanoimprint template substrate having a body having a first and second opposed sides, the second side having a mesa extending therefrom, the mesa having sidewalls and a surface, the surface having an interior region surrounded by a perimeter region;
- forming a mask layer on the interior region of the mesa surface;
- etching a recessed shelf into the perimeter region of the mesa surface using the mask layer as an etch mask;
- depositing a light blocking material on at least the recessed shelf at a thickness that is at or less than the depth of the recessed shelf;
- and
- removing the mask layer, such that the light blocking material does not extend beyond a plane defined by the surface of the remaining interior region of the mesa surface.
A method of manufacturing an article, the method comprising:
- positioning a formable material on a substrate;
- contacting the formable material with an imprint template, the imprint template having,
- a body having first and second opposed sides, the second side having a mesa extending therefrom, the mesa having sidewalls and a surface;
- a recessed shelf extending around a perimeter of the mesa surface, and
- a light-blocking material positioned on at least the recessed shelf at a thickness such that the light-blocking material does not extend beyond a plane defined by the mesa surface;
- and
- applying actinic energy to cure the formable material.
Dependencies are inferred from the claim text.