Probe systems for testing a device under test

A probe system comprising:

• a platen defining an upper surface, an opposed lower surface, and a platen aperture extending between the upper surface and the lower surface;
• a chuck defining a support surface configured to support a substrate that includes a device under test (DUT);
• a lower enclosure extending from the lower surface of the platen, wherein the lower enclosure and the lower surface of the platen together define a lower volume, and further wherein the support surface of the chuck extends within the lower volume;
• an upper enclosure extending from the upper surface of the platen, wherein the upper enclosure and the upper surface of the platen together define an upper volume, wherein the platen aperture extends between the upper volume and the lower volume, and further wherein the upper enclosure includes a side wall that defines a side wall aperture, wherein the side wall and the platen define an intersection angle of at least 30 degrees and at most 60 degrees;
• a manipulator operatively attached to the upper surface of the platen and including a probe shaft mount and a test head mount, wherein the manipulator is configured to operatively translate a manipulated assembly, which includes both the probe shaft mount and the test head mount, relative to the platen along two at least substantially perpendicular translation axes;
• a probe shaft arm defining a manipulator-proximal end and a manipulator-distal end, wherein the probe shaft arm extends from the probe shaft mount and through the side wall aperture, and further wherein the manipulator-distal end of the probe shaft arm defines a probe mount;
• a probe assembly operatively attached to the probe mount and including a probe tip configured to contact the DUT, wherein the probe assembly includes a probe electrical connection, and further wherein at least a portion of the probe assembly extends through the platen aperture to facilitate contact between the probe tip and the DUT;
• a test head operatively attached to the test head mount and defining a test head electrical connection, wherein the test head is configured to at least one of provide a test signal to the test head electrical connection and receive a resultant signal from the test head electrical connection;
• and
• an electrical conductor extending through the side wall aperture and between the test head electrical connection and the probe electrical connection.