Back to results
US 2019/0101566 A1Published application
Physical quantity sensor, inertia measurement device, vehicle positioning device, portable electronic apparatus, electronic apparatus, and vehicle
AssigneeSeiko Epson Corporation
InventorsShogo INABA, Atsuki NARUSE, Shigekazu TAKAGI, Tomokazu UMENO, Satoru TANAKA
Life of this patent
Estimating the term…
Abstract
A physical quantity sensor includes a substrate, an element portion disposed so as to overlap the substrate, a conductor pattern disposed on the substrate so as to face the element portion, and a protection film covering at least a part of an exposed portion of the conductor pattern exposed from element portion in a plan view from a direction in which the substrate and the element portion overlap.
Claims20
A physical quantity sensor comprising:
- a substrate;
- an element portion disposing overlap the substrate;
- a conductor pattern disposed on the substrate facing the element portion;
- and
- a protection film covering at least a part of an exposed portion of the conductor pattern exposed from the element portion in a plan view from a direction in which the substrate and the element portion overlap.
2 more elements
Dependencies are inferred from the claim text.