Method for Forming Biochips and Biochips With Non-Organic Landings for Improved Thermal Budget
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChia-Hua Chu, Allen Timothy Chang, Ching-Ray Chen, Yi-Hsien Chang, Yi-Shao Liu, Chun-Ren Cheng, Chun-Wen Cheng
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