Semiconductor element, method for manufacturing same, wireless communication device, and sensor
AssigneeToray Industries, Inc.
InventorsKazuki ISOGAI, Seiichiro MURASE, Kazumasa NAGAO
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Abstract
A semiconductor element including a substrate, a first electrode, a second electrode, and a semiconductor layer disposed between the first electrode and the second electrode, wherein the semiconductor layer contains at least one selected from carbon nanotubes and graphene, and a relationship between a channel length LC and a channel width WC of the semiconductor element is 0.01≤WC/LC≤0.8. A semiconductor element having excellent switching characteristics and high detection sensitivity when used as a sensor is provided.
Claims17
A semiconductor element comprising a substrate, a first electrode, a second electrode, and a semiconductor layer disposed between the first electrode and the second electrode, wherein the semiconductor layer contains at least one selected from carbon nanotubes and graphene, and a relationship between a channel length LC and a channel width WC of the semiconductor element is 0.01≤WC/LC≤0.8.
Dependencies are inferred from the claim text.