Measuring device, observing device and measuring method
AssigneeHamamatsu Photonics K.K.
InventorTomonori NAKAMURA
Life of this patent
Estimating the term…
Abstract
The present invention relates to a measuring device having a structure for adjusting inclination of an observation surface of a sample with respect to a reference surface which is orthogonal to an optical axis of an objective lens, and the like. The measuring device includes a scanner, arranged on a propagation path of illumination light traveling from a light source toward the sample, configured to change an emission angle of the illumination light, and inclination information of the sample is obtained by associating a signal value of a detection signal for reflected light from the sample and the emission angle of the illumination light, while changing the emission angle of the illumination light by the scanner.
Claims19
A measuring device which has a relay lens system configured to guide illumination light to a light illumination region on a sample, and measures inclination of the light illumination region with respect to a reference surface orthogonal to an optical axis of the relay lens system, the measuring device comprising:
- a light source configured to output the illumination light;
- a sample holder configured to change an inclination angle of the light illumination region with respect to the reference surface while holding the sample;
- the relay lens system arranged so as to face the sample holder;
- a scanner arranged on an optical path between the light source and the relay lens system, the scanner configured to change an emission angle of the illumination light emitted from the relay lens system;
- a photodetector configured to receive reflected light transmitted through the relay lens system and the scanner from the light illumination region, and output a detection signal according to the reflected light;
- and
- an analyzer configured to obtain inclination information regarding the light illumination region of the sample, by associating information regarding the emission angle of the illumination light outputted from the scanner and information regarding a signal value of the detection signal.
A measuring method for guiding illumination light to a light illumination region of a sample through a lens system, and for measuring inclination of the light illumination region with respect to a reference surface orthogonal to an optical axis of the lens system, the measuring method comprising:
- causing a sample holder configured to change inclination of the light illumination region with respect to the reference surface to hold the sample;
- adjusting a focus position of the lens system on the light illumination region;
- arranging a relay lens system, as the lens system, to face the sample;
- radiating the illumination light on the sample while changing an incident angle of the illumination light emitted from the relay lens system to the light illumination region by causing a scanner, arranged on a propagation path of the illumination light, to output the illumination light while changing an emission angle;
- receiving reflected light reflected from the light illumination region, and outputting a detection signal according to the reflected light;
- and
- obtaining inclination information regarding the light illumination region of the sample by associating, with each other, information regarding the emission angle of the illumination light outputted from the scanner and information regarding the detection signal.
Dependencies are inferred from the claim text.