Optical and electromechanical resonator

Abstract

The invention is an electromechanical resonator, comprising a fixed portion (10) and an oscillator (20, 60), the oscillator being able to oscillate at a resonant frequency (f), the oscillator comprising: a fluidic channel (25), defining a fluidic circuit, produced in the oscillator (20, 60), and intended to receive a fluid (4), the fluidic channel being able to be deformed at the resonant frequency, under the effect of the oscillation of the oscillator; the resonator being characterized in that it also includes: a waveguide (26), defining a photonic circuit, produced in the oscillator (20, 60), and intended to guide a light wave (7) between an input (26in) and an output (26out) of the waveguide, the waveguide (26) being able to be deformed at the resonant frequency (f), under the effect of the oscillation of the oscillator; the input (26in) of the waveguide being able to be connected to a light source (6), the output of the waveguide being able to be connected to a photodetector (8), so that the photodetector is able to form a signal (S) representative of the light wave propagated by the waveguide towards the photodetector, the light wave being modulated at a modulation frequency (w) dependent on the resonant frequency (f); such that when under the effect of a variation (δm) in a mass (m) of the fluid (4), inducing a variation (δf) in the resonant frequency, the variation (δm) in mass may be detected via the signal formed by the photodetector.

Dependencies are inferred from the claim text.