Laser processing apparatus and output power checking method
AssigneeDisco Corporation
InventorKentaro ODANAKA
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AssigneeDisco Corporation
InventorKentaro ODANAKA
Estimating the term…
A laser processing apparatus includes a branching unit configured to branch a laser beam to a first optical path and a second optical path, a condenser configured to condense the branched laser beams on a processing face of a workpiece, an output power measuring unit configured to measure the output power of the laser beam emitted from a laser beam generation unit and having passed through the condenser, and a blocking member positioning mechanism disposed between the condenser and the output power measuring unit and capable of positioning a blocking member between a first laser beam blocking position at which the blocking member blocks only the laser beam of the first optical path from between the branched laser beams and a retracted position at which the blocking member blocks none of the laser beams.
A laser processing apparatus, comprising:
An output power checking method for checking, in a laser processing apparatus in which a laser beam emitted from a laser beam generation unit is branched at least to a first optical path and a second optical path by a branching unit and the branched laser beams are condensed to and irradiated upon a processing face of a workpiece held on a holding table by a condenser, output power of the branched laser beams, the output power checking method comprising:
Dependencies are inferred from the claim text.