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US 2019/0101391 A1Published application
Physical quantity sensor, inertia measurement device, vehicle positioning device, portable electronic apparatus, electronic apparatus, and vehicle
AssigneeSeiko Epson Corporation
InventorsKazuyuki NAGATA, Takayuki KIKUCHI
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Abstract
A physical quantity sensor includes a drive vibrator, a detection vibrator, and an elastic deformation portion disposed between the drive vibrator and the detection vibrator and elastically deformable along a first axis in which the drive vibrator and the detection vibrator are aligned, in plan view, and in which the drive vibrator and the detection vibrator vibrate in reverse phases along the first axis. The drive vibrator and the detection vibrator vibrating alternately repeat approaching and separating from each other along the first axis.
Claims20
A physical quantity sensor comprising:
- a substrate;
- a drive vibrator that faces of the substrate;
- a detection vibrator that faces of the substrate;
- and
- an elastic deformation portion that is disposed between the drive vibrator and the detection vibrator and elastically deformable along a first axis in which the drive vibrator and the detection vibrator are aligned, in a plan view,
- wherein the drive vibrator and the detection vibrator vibrate in reverse phases along the first axis.
3 more elements
Dependencies are inferred from the claim text.