Fluid system

A fluid system, produced by an integrated method, and comprising:

• at least one fluid actuating region including at least one fluid-guiding unit, wherein the at least one fluid-guiding unit includes:
• at least one inlet plate having at least one inlet aperture;
• at least one substrate;
• at least one resonance plate having at least one central aperture, wherein at least one first chamber is formed between the resonance plate and the inlet plate;
• at least one actuating plate having at least one suspension part, at least one outer frame part and at least one interspace;
• at least one piezoelectric member attached on a surface of the suspension part of the actuating plate;
• and
• at least one outlet plate having at least one outlet aperture,
• wherein the inlet plate, the substrate, the resonance plate, the actuating plate and the outlet plate are stacked sequentially, at least one gap formed between the resonance plate and the actuating plate is defined as at least one second chamber, and at least one third chamber is formed between the actuating plate and the outlet plate, wherein while the piezoelectric member drives the actuating plate to undergo a bending vibration in resonance, at least one pressure difference is formed between the second chamber and the third chamber so that fluid is inhaled into the first chamber through the at least one inlet aperture, is transported to the second chamber through the central aperture of the resonance plate, is transported to the third chamber through the at least one interspace, and is finally discharged out from the outlet aperture of the outlet plate;
• at least one fluid channel in communication with the outlet aperture of the fluid actuating region, and having a plurality of branch channels, wherein the fluid transported in the fluid actuating region is split by the branch channels, so that a required amount of the fluid to be transported is determined;
• at least one convergence chamber in communication with the fluid channel and disposed for allowing the fluid to be accumulated therein;
• at least one sensor disposed in the fluid channel for measuring the fluid within the fluid channel;
• and
• a plurality of valves respectively disposed in the branch channels, wherein the fluid is discharged out through the branch channels by controlling opened/closed states of the valves.