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US 2019/0101110 A1Published application
Ultra high vacuum cryogenic pumping apparatus with nanostructure material
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsSurendra Babu Anantharaman, Wen-Cheng Yang, Chung-En Kao, Victor Y. Lu, Wei Chin
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Abstract
Cryogenic pump apparatuses include nanostructure material to achieve an ultra-high vacuum level. The nanostructure material can be mixed with either an adsorbent material or a fixed glue layer which is utilized to fix the adsorbent material. The nanostructure material's good thermal conductivity and adsorption properties help to lower working temperature and extend regeneration cycle of the cryogenic pumps.
Claims20
A cryogenic pumping apparatus comprising:
- a canister having a flange to be coupled to a vacuum chamber;
- a cryogenic blade array arranged within the canister, the cryogenic blade array including a first plurality of blades closer to the vacuum chamber and a second plurality of blades further from the vacuum chamber;
- a fixed glue layer on a blade of the cryogenic blade array, and
- an adsorbent material on the fixed glue layer, at least one of the adsorbent material or the fixed glue layer including a carbon nanotube material
- wherein the carbon nanotube material is arranged on the second plurality of blades and absent from the first plurality of blades.
2 more elements
A method comprising:
- applying a fixed glue layer on a blade of a cryogenic blade array;
- and
- applying an adsorbent material on the fixed glue layer;
- wherein the fixed glue layer and the adsorbent material are formed on both upper and lower surfaces of the blade of the cryogenic blade array.
1 more element
A multi-stage cryogenic pumping apparatus comprising:
- a canister having a flange to be coupled to a vacuum chamber;
- a first stage within the canister, the first stage to be in fluid communication with the vacuum chamber and including an inlet array to condense gases having boiling points within a first temperature range;
- and
- a second stage within the canister, the second stage to be in fluid communication with the vacuum chamber but fluidly downstream of the first stage relative to the vacuum chamber, the second stage including a cold header to cool a cryogenic blade array in the second stage, the cryogenic blade array including a carbon nanotube material mixed with a fixed glue layer to trap gases having boiling points within a second temperature range that is less than the first temperature range;
- wherein a thermal conductivity of the fixed glue layer mixed with the carbon nanotube material is larger than that of the fixed glue layer not mixed with the carbon nanotube material.
2 more elements
Dependencies are inferred from the claim text.