System and methods for deposition spray of particulate coatings
AssigneeArizona Board of Regents on behalf of Arizona State University
InventorsPeter Alexander FIRTH, Zachary HOLMAN
Life of this patent
Estimating the term…
Abstract
A particle deposition system can have a particle source providing a nanomaterial at a controlled rate and a gas distribution system coupled with the particle source and operable to receive the nanomaterial aerosol. A high pressure chamber can be coupled with the gas distribution system, and a nozzle can be disposed between the high pressure chamber and a low pressure chamber. The nozzle can have a nozzle opening allowing fluidic communication of a nanomaterial aerosol between the high pressure chamber and the low pressure chamber and the opening can have a length exceeding a width.
Claims30
A particle deposition apparatus comprising:
- a high pressure chamber capable of producing a nanomaterial aerosol from a plurality of gas or vapor precursors;
- a nozzle, having an entrance and an exit, coupled to the high pressure chamber at the entrance;
- and
- a low pressure chamber, maintained at a pressure between about 0.001 Torr and about 100 Torr, coupled to the nozzle at the exit, wherein a nozzle opening allows fluidic communication between the high pressure chamber and the low pressure chamber, the nozzle opening having a length exceeding a width.
A particle deposition apparatus comprising:
- a high pressure chamber capable of producing a nanomaterial aerosol from a solid target;
- a nozzle, having an entrance and an exit, coupled to the high pressure chamber at the entrance;
- and
- a low pressure chamber, maintained at a pressure between about 0.001 Torr and about 100 Torr, coupled to the nozzle at the exit, wherein a nozzle opening allows fluidic communication between the high pressure chamber and the low pressure chamber, the nozzle opening having a length exceeding a width.
A particle deposition apparatus comprising:
- a high pressure chamber capable of producing a nanomaterial aerosol from a colloidal solution;
- a nozzle, having an entrance and an exit, coupled to the high pressure chamber at the entrance;
- and
- a low pressure chamber, maintained at a pressure between about 0.001 Torr and about 100 Torr, coupled to the nozzle at the exit, wherein a nozzle opening allows fluidic communication between the high pressure chamber and the low pressure chamber, the nozzle opening having a length exceeding a width.
A method of particle deposition comprising:
- producing a nanomaterial aerosol, in a high pressure chamber, wherein the nanomaterial aerosol is synthesized from one of gas and/or vapor precursors, erosion of a solid target, and/or a colloidal solution;
- transporting the nanomaterial aerosol to a nozzle;
- accelerating the nanomaterial aerosol through the nozzle to a predetermined velocity into a low pressure chamber;
- impacting the nanomaterial aerosol against a substrate at the predetermined velocity in the low pressure chamber.
Dependencies are inferred from the claim text.