Vapor deposition mask, vapor deposition mask preparation body, method for producing vapor deposition mask, and method for producing organic semiconductor element

A method for producing an organic electroluminescence element, comprising

• a step of forming a light-emitting layer of the organic electroluminescence element on a vapor deposition target by using a support-equipped vapor deposition mask in which a vapor deposition mask is fixed to a metal support member having a rectangular shape, wherein
• the vapor deposition mask includes:
• a metal mask in which a through-hole is provided;
• and a resin mask in which openings corresponding to a pattern of the light-emitting layer to be produced by vapor deposition are provided at a position overlapping the through-hole, the metal mask and the resin mask being stacked, wherein the resin mask has a first surface arranged to face the vapor deposition target and an opposed second surface, and the metal mask covers at least a portion of the second surface of the resin mask, and the metal mask has a general region in which the through-hole is provided and a thick region larger in thickness than the general region.

A method for producing an organic electroluminescence element, comprising

• a step of forming a light-emitting layer of the organic electroluminescence element on a vapor deposition target by using a vapor deposition mask, wherein
• the vapor deposition mask includes:
• a rectangular metal mask in which a through-hole is provided;
• and a rectangular resin mask in which openings corresponding to a pattern of the light-emitting layer to be produced by vapor deposition are provided at a position overlapping the through-hole, the metal mask and the resin mask being stacked, wherein the resin mask has a first surface arranged to face the vapor deposition target and an opposed second surface, and the metal mask covers at least a portion of the second surface of the resin mask, and the metal mask has a general region in which the through-hole is provided and a thick region larger in thickness than the general region, wherein
• the thick region is positioned on the outer edge of the metal mask.

A method for producing an organic electroluminescence element, comprising

• a step of forming a light-emitting layer of the organic electroluminescence element on a vapor deposition target by using a vapor deposition mask, wherein
• the vapor deposition mask includes:
• a rectangular metal mask in which a through-hole is provided;
• and a rectangular resin mask in which openings corresponding to a pattern of the light-emitting layer to be produced by vapor deposition are provided at a position overlapping the through-hole, the metal mask and the resin mask being stacked, wherein the resin mask has a first surface arranged to face the vapor deposition target and an opposed second surface, and the metal mask covers at least a portion of the second surface of the resin mask, and the metal mask has a general region in which the through-hole is provided and a thick region larger in thickness than the general region, wherein
• the thick region is arranged in a grid shape.