Method of making a carbonized film
AssigneeTaimide Tech. Inc.
InventorsJIA-HAO WU, YU-CHEN LAI
Life of this patent
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Abstract
A method of making a carbonized film is provided. The method is characterized in that a polyimide film is used as a precursor, on which a carbonizing heat treatment is performed. The heating rate during the carbonizing heat treatment within 500 to 800 degrees Celsius is equal to or lower than 2 degrees Celsius per minute. The highest carbonizing temperature is equal to or higher than 1000 degrees Celsius so as to form a carbonized film. The carbonized film is processed with a graphitizing heat treatment, in which the heating rate for graphitization at 2200 degrees Celsius or above is equal to or lower than 3 degrees Celsius per minute. The highest graphitizing temperature is equal to or higher than 2500 degrees Celsius.
Claims5
A method of making a carbonized film, comprising:
- providing a polyimide film as a precursor;
- and
- performing a carbonizing heat treatment on the polyimide film,
- wherein the heating rate for carbonization within 500 to 800 degrees Celsius is equal to or lower than 2 degrees Celsius, and the highest carbonization temperature is equal to or higher than 1000 degrees Celsius.
Dependencies are inferred from the claim text.