Mems devices and processes
AssigneeCirrus Logic International Semiconductor Ltd.
InventorsTom HANLEY, Colin Robert JENKINS, Euan James BOYD
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Abstract
A MEMS transducer and method of forming a MEMS transducer. The MEMS transducer comprises a flexible membrane and a backplate, a membrane electrode being located on a polygon shaped first surface of the flexible membrane, and a backplate electrode being located on a first surface of the backplate facing the membrane electrode. At least one of the membrane electrode and the backplate electrode has an outline shape configured to correspond to a contour of a contour map, the contour map representing relative amounts of displacement of portions of the flexible membrane from an equilibrium position in response to pressure differences generated by incident sound waves.
Claims17
A MEMS transducer comprising a flexible membrane and a backplate,
- a membrane electrode being located on a polygon shaped first surface of the flexible membrane, and a backplate electrode being located on a first surface of the backplate facing the membrane electrode,
- wherein at least one of the membrane electrode and the backplate electrode has an outline shape configured to correspond to a contour of a contour map, the contour map representing relative amounts of displacement of portions of the flexible membrane from an equilibrium position in response to pressure differences generated by incident sound waves.
A method of forming a MEMS transducer comprising a flexible membrane and a backplate, a membrane electrode being located on a polygon shaped first surface of the flexible membrane, and a backplate electrode being located on a first surface of the backplate facing the membrane electrode, the method comprising:
- simulating the flexible membrane of the MEMS transducer;
- modelling the displacement of the simulated flexible membrane in response to pressure differences generated by incident sound waves;
- producing a contour map representing relative amounts of displacement of portions of the flexible membrane from an equilibrium position in response to pressure differences generated by incident sound waves;
- designing an outline shape of at least one of the membrane electrode and the backplate electrode to correspond to a contour of the contour map;
- and
- producing the MEMS transducer in accordance with the design.
A MEMS transducer comprising:
- a polygon shaped flexible membrane;
- and
- a membrane electrode located on a surface of the flexible membrane,
- wherein the membrane electrode is shaped to substantially correspond to a contour of a contour map, the contour map representing relative amounts of displacement of portions of the flexible membrane from an equilibrium position in response to incident pressure waves.
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Dependencies are inferred from the claim text.