Methods and apparatus for monitoring robot health in manufacturing environments
AssigneeIntel Corporation
InventorsRita Chattopadhyay, Mruthunjaya Chetty, Jeffrey Davis, Stephanie Cope, Xiaozhong Ji
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Abstract
Methods, apparatus, systems, and articles of manufacture for monitoring robot health in manufacturing environments are described herein. An example system, to monitor health of a robot in a semiconductor wafer manufacturing facility, includes a sensor coupled to the robot. The sensor is to obtain a vibration signal representative of vibration of the robot. The example system also includes a health monitor extract a feature from the vibration signal, compare the feature to a threshold, and, in response to determining the feature satisfies the threshold, transmit an alert.
Claims21
A system to monitor health of a robot in a semiconductor wafer manufacturing facility, the system comprising:
- a sensor coupled to the robot, the sensor to obtain a vibration signal representative of vibration of the robot;
- and
- a health monitor to:
- extract a feature from the vibration signal;
- compare the feature to a threshold;
- and
- in response to determining the feature satisfies the threshold, transmit an alert.
A method to monitor health of a robot in a semiconductor wafer manufacturing facility, the method comprising:
- extracting, by executing an instruction with at least one processor, a feature of a vibration signal obtained by a sensor coupled to the robot;
- comparing the feature to a threshold;
- and
- generating, by executing an instruction with the least one processor, an alert when the feature satisfies the threshold.
A non-transitory machine readable storage medium comprising instructions that, when executed, cause at least one machine to at least:
- extract a feature of a vibration signal obtained by a sensor coupled to a robot in a semiconductor wafer manufacturing facility;
- compare the feature to a threshold;
- and
- generate an alert when the feature satisfies the threshold.
Dependencies are inferred from the claim text.