US 2019/0099774 A1Published application

Fluid system

AssigneeMicrojet Technology Co., Ltd.

InventorsHao-Jan Mou, Chi-Feng Huang, Wei-Ming Lee, Hsuan-Kai Chen

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Abstract

A fluid system includes a fluid active region, a fluid channel, a convergence chamber and plural valves. The fluid active region includes one or plural fluid-guiding units. Each fluid-guiding unit includes an inlet plate, a substrate, a resonance plate, an actuating plate, a piezoelectric element and an outlet plate, which are stacked sequentially. The piezoelectric element is attached on the actuating plate. When the piezoelectric element drives a bending resonance of the actuating plate, the fluid is transported into the fluid-guiding units and pressurized to be discharged out. The fluid channel includes plural branch channels. The fluid discharged from the fluid active region is split by the branch channels. The convergence chamber is in communication with the fluid channel. The valves are disposed in the branch channels. The fluid is transported through the branch channels according to the open/closed states of the valves.

Claims15

Dependent claims

A fluid system produced by an integrated process, comprising:

a fluid active region comprising at least one fluid-guiding unit each of which comprises:
an inlet plate comprising at least one inlet aperture;
a substrate;
a resonance plate having a central aperture, wherein a first chamber is formed between the resonance plate and the inlet plate;
an actuating plate having a suspension part, an outer frame part and at least one vacant space;
a piezoelectric element attached on a surface of the suspension part of the actuating plate;
and
an outlet plate having an outlet aperture,
wherein the inlet plate, the substrate, the resonance plate, the actuating plate and the outlet plate are stacked sequentially, a gap formed between the resonance plate and the actuating plate is defined as a second chamber, and a third chamber is formed between the actuating plate and the outlet plate, wherein the piezoelectric element drives a bending resonance of the actuating plate to generate a pressure difference between the second chamber and the third chamber so that fluid is inhaled into the first chamber through the at least one inlet aperture of the inlet plate, transported to the second chamber through the central aperture of the resonance plate, transported to the third chamber through the at least one vacant space, and discharged out through the outlet aperture of the outlet plate;
a fluid channel in communication with the outlet aperture of the fluid active region, and comprising plural branch channels, wherein the fluid discharged from the fluid active region is split by the branch channels, so that a required amount of the fluid to be transported is achieved;
a convergence chamber in communication with the fluid channel for allowing the fluid to be accumulated therein;
and
a plurality of valves, each of which disposed in the corresponding branch channel, wherein the fluid is discharged out through the corresponding branch channel according to an open/closed state of the valve disposed therein.

10 more elements

A fluid system produced by an integrated process, comprising:

at least one fluid active region comprising at least one fluid-guiding unit each of which comprises:
at least one inlet plate comprising at least one inlet aperture;
at least one substrate;
at least one resonance plate having at least one central aperture, wherein at least one first chamber is formed between the resonance plate and the inlet plate;
at least one actuating plate having at least one suspension part, at least one outer frame part and at least one vacant space;
at least one piezoelectric element attached on a surface of the suspension part of the actuating plate;
and
at least one outlet plate having at least one outlet aperture,
wherein the inlet plate, the substrate, the resonance plate, the actuating plate and the outlet plate are stacked sequentially, at least one gap formed between the resonance plate and the actuating plate is defined as at least one second chamber, and at least one third chamber is formed between the actuating plate and the outlet plate, wherein the piezoelectric element drives a bending resonance of the actuating plate to generate at least one pressure difference between the second chamber and the third chamber so that fluid is inhaled into the first chamber through the at least one inlet aperture of the inlet plate, transported to the second chamber through the central aperture of the resonance plate, transported to the third chamber through the at least one vacant space, and discharged out through the outlet aperture of the outlet plate;
at least one fluid channel in communication with the outlet aperture of the fluid active region, and comprising plural branch channels, wherein the fluid discharged from the fluid active region is split by the branch channels, so that a required amount of the fluid to be transported is achieved;
at least one convergence chamber in communication with the fluid channel for allowing the fluid to be accumulated therein;
and
a plurality of valves, each of which disposed in the corresponding branch channel, wherein the fluid is discharged out through the corresponding branch channel according to an open/closed state of the valve disposed therein.

10 more elements

Dependencies are inferred from the claim text.