Gas filter
AssigneeEntegris, Inc.
InventorYuki NAKAMURA
Life of this patent
Estimating the term…
Abstract
A gas filter includes a housing including a mounting portion and a main portion. The mounting portion is configured to mount the gas filter on a surface of a device. The main portion is configured to be positioned apart from the surface of the device and extends from the mounting portion in a horizontal direction. The housing has an inlet and an outlet and defines a flow channel between the inlet and the outlet. The flow channel has first and second channel portions, the first channel portion extending from the inlet to the second channel portion, the second channel portion extending in a direction substantially parallel to the horizontal direction. A filter member is positioned in the flow channel between the inlet and the outlet.
Claims16
A gas filter, comprising:
- a housing including a mounting portion and a main portion, the mounting portion configured to mount the gas filter on a surface of a device, the main portion configured to be positioned apart from the surface of the device, the main portion extending from the mounting portion in a horizontal direction, the housing having an inlet and an outlet and defining a flow channel between the inlet and the outlet, the flow channel having first and second channel portions, the first channel portion extending from the inlet to the second channel portion, the second channel portion extending in a direction substantially parallel to the horizontal direction;
- and
- a filter member positioned in the flow channel between the inlet and the outlet.
Dependencies are inferred from the claim text.