Wireless sensor for measuring pressure

An implantable wireless sensor for determining a physical property of a medium comprising:

• an upper wafer formed from a dielectric material, the upper wafer having one or more channels;
• a first capacitor plate and a second capacitor plate formed on a lower surface of the upper wafer;
• an inductor formed from one or more windings of a conductive material, the inductor being contained within the one or more channels in the upper wafer in fixed relation to the first and second capacitor plates, the inductor comprising first and second inductor leads, the first lead being electrically coupled to the first capacitor plate and the second lead electrically coupled to the second capacitor plate;
• a lower wafer formed from the dielectric material, the lower wafer being thinner than the upper wafer;
• and
• a third capacitor plate formed on an inner surface of the lower wafer, the upper and lower wafers being fused together to form a monolithic housing such that the first and second capacitor plates are arranged in parallel, spaced-apart relation from the third capacitor plate to form a capacitor, a portion of the lower wafer comprising a pressure sensitive deflective region underlying at least a portion of the third capacitor plate, whereby the deflective region deflects in response to changes in ambient pressure in the medium altering the spacing between the first and second capacitor plates and the third capacitor plate.