Wiring substrate for electronic component inspection apparatus
AssigneeNgk Spark Plug Co., Ltd.
InventorsTakakuni NASU, Masaomi HATTORI
Life of this patent
Estimating the term…
Loading patent…
AssigneeNgk Spark Plug Co., Ltd.
InventorsTakakuni NASU, Masaomi HATTORI
Estimating the term…
A wiring substrate for electronic component inspection apparatus includes a first laminate which is formed by stacking a plurality of ceramic layers and which has a front surface and a back surface, and a plurality of studs joined to the back surface of the first laminate, wherein each of the studs is composed of a flange portion which is circular in bottom view, and a bolt portion which perpendicularly extends from a center portion of an outside surface of the flange portion; and the flange portion has a truncated conical shape and the outside surface from which the bolt portion protrudes, such that the outside surface slopes from the proximal end side of the bolt portion toward the peripheral edge of the flange portion and gradually approaches the inside surface of the flange portion.
A wiring substrate for electronic component inspection apparatus comprising a first laminate which is formed by stacking a plurality of ceramic layers and which has a front surface and a back surface, and a plurality of studs joined to the back surface of the first laminate,
Dependencies are inferred from the claim text.