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US 2019/0098419 A1Published application
Sensor with movable part and biasing
AssigneeInfineon Technologies AG
InventorsChristoph Bernhard Wurzinger, Jose Luis Ceballos
Life of this patent
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Abstract
Methods and apparatuses are provided wherein a sensor which comprises at least two electrodes and a movable part is alternately biased with at least two different voltages.
Claims21
1-25. (canceled)
An apparatus, comprising:
- a sensor including a first electrode, a second electrode, and a movable part arranged between the first electrode and the second electrode;
- a first switch coupling a voltage source with:
- the movable part, or
- the first electrode and the second electrode;
- a second switch coupling a second voltage source with:
- the movable part, or
- the first electrode and the second electrode;
- a first amplifier coupled with the first electrode via a first input of the first amplifier;
- and
- a second amplifier coupled with the second electrode via a first input of the second amplifier.
7 more elements
An apparatus, comprising:
- a sensor comprising a first electrode, a movable part, and a second electrode;
- a first switch coupling a first voltage source with:
- the movable part, or
- the first electrode and the second electrode;
- a second switch coupling a second voltage source with:
- the movable part, or
- the first electrode and the second electrode;
- a clock, coupled to the first switch and the second switch, to alternately close and open the first switch and the second switch;
- a first amplifier coupled with the first electrode;
- and
- a second amplifier coupled with the second electrode.
8 more elements
A method, comprising:
- receiving, by an apparatus and via a first switch, a first voltage from a first voltage source,
- the apparatus comprising a sensor that comprises a first electrode, a second electrode, and a movable part arranged between the first electrode and the second electrode, and
- the first switch coupling the first voltage source with:
- the movable part, or
- the first electrode and the second electrode;
- receiving, by the apparatus and via a second switch, a second voltage from a second voltage source,
- the second switch coupling the second voltage source with:
- the movable part, or
- the first electrode and the second electrode;
- coupling, by the apparatus, the first electrode and an input of a first amplifier;
- and
- coupling, by the apparatus, the second electrode and an input of a second amplifier.
9 more elements
Dependencies are inferred from the claim text.