Universal multiprotocol industrial data logger
AssigneeLam Research Corporation
InventorsAles Janhar, Behzad Lajevardi
Life of this patent
Estimating the term…
Loading patent…
AssigneeLam Research Corporation
InventorsAles Janhar, Behzad Lajevardi
Estimating the term…
A data capture module includes a first port configured to receive first data transmitted from a first component to a second component of a substrate processing system, a second port configured to received second data transmitted from the second component to the first component, a first data stream forwarding module configured to duplicate the first data, forward the duplicated first data to the second port, and output the first data, and a second data stream forwarding module configured to duplicate the second data, forward the duplicated second data to the first port, and output the second data. The first port is configured to transmit the duplicated second data to the first component and the second port is configured to transmit the duplicated first data to the second component. A data compression module is configured to compress the first and second data. Data storage is configured to store the compressed data.
A data capture module for capturing data transmitted between first and second components of a substrate processing system, the data capture module comprising:
A method for capturing data transmitted between first and second components of a substrate processing system, the method comprising:
Dependencies are inferred from the claim text.