Elastic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorTetsuya KIMURA
Life of this patent
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Abstract
In an elastic wave device that utilizes longitudinal wave leaky elastic wave, an IDT electrode is provided on a first or second principal surface of a piezoelectric layer, an energy confinement layer that is laminated on the second principal surface of the piezoelectric layer so as to support the piezoelectric layer and confines energy of the longitudinal wave leaky elastic wave into the piezoelectric layer is provided, a thickness of the piezoelectric layer is λ or less when λ represents a wavelength determined according to an electrode finger pitch of the IDT electrode, and a groove is provided in at least one of the first and second principal surfaces of the piezoelectric layer, and the IDT electrode includes a portion in the groove.
Claims19
An elastic wave device that utilizes longitudinal wave leaky elastic wave, comprising:
- a piezoelectric layer including a first principal surface and a second principal surface that face each other;
- an inter-digital transducer (IDT) electrode provided on one of the first principal surface and the second principal surface of the piezoelectric layer;
- and
- an energy confinement layer that is laminated on the second principal surface of the piezoelectric layer so as to support the piezoelectric layer and confines energy of the longitudinal wave leaky elastic wave in the piezoelectric layer;
- wherein
- a thickness of the piezoelectric layer is λ or less when λ represents a wavelength determined according to an electrode finger pitch of the IDT electrode;
- a groove is provided in the one of the first principal surface and the second principal surface of the piezoelectric layer;
- and
- the IDT electrode includes a portion disposed in the groove.
Dependencies are inferred from the claim text.