Laser radar
AssigneeShenzhen Genorivision Technology Co., Ltd.
InventorsPeiyan CAO, Yurun LIU
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Abstract
An apparatus comprises an array of vertical-cavity surface-emitting lasers (VCSELs) on a first substrate and an array of detectors on a second substrate, the detectors being configured to detect laser beams emitted by the VCSELs and backscattered by an object, wherein the first substrate is mounted to the second substrate and is configured to allow the laser beams emitted by the VCSELs and backscattered by the object to transmit through the first substrate and reach the detectors.
Claims18
An apparatus, comprising:
- an array of vertical-cavity surface-emitting lasers (VCSELs) on a first substrate;
- an array of detectors on a second substrate, the detectors configured to detect laser beams emitted by the VCSELs and backscattered by an object;
- wherein the first substrate is mounted to the second substrate and is configured to allow the laser beams emitted by the VCSELs and backscattered by the object to transmit through the first substrate and reach the detectors.
A method comprising:
- forming an array of vertical-cavity surface-emitting lasers (VCSELs) on a first substrate;
- forming an array of detectors on a second substrate, the detectors configured to detect laser beams emitted by the VCSELs and backscattered by an object;
- mounting the first substrate to the second substrate;
- wherein the first substrate is configured to allow the laser beams emitted by the VCSELs and backscattered by the object to transmit through the first substrate and reach the detectors.
The method of claim 18, wherein forming the windows comprises etching the first substrate.
Dependencies are inferred from the claim text.