Laser light source device
AssigneeUshio Denki Kabushiki Kaisha
InventorAkihiro SHIMIZU
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Abstract
A laser light source device has a light source unit including a semiconductor laser element that emits laser light having a predetermined wavelength band at a temperature from an allowable lower limit temperature to an allowable upper limit temperature, a cooler, an element temperature measurement section, a cooler temperature measurement section, and a controller that controls the cooler. The controller controls the cooler such that the cooler temperature approaches a set temperature. The controller lowers the set temperature as long as the element temperature exceeds the allowable upper limit temperature, and the controller increases the set temperature as long as the element temperature falls below the allowable lower limit temperature.
Claims16
A laser light source device comprising:
- a light source unit including a semiconductor laser element that emits laser light having a predetermined wavelength band at a temperature from an allowable lower limit temperature to an allowable upper limit temperature;
- a cooler connected to the light source unit;
- an element temperature measurement section that measures an element temperature which is a temperature of the semiconductor laser element;
- a cooler temperature measurement section that measures a cooler temperature which is a temperature of the cooler and is a temperature at a position away from the element temperature;
- and
- a controller that controls the cooler,
- wherein the controller controls the cooler such that the cooler temperature approaches a set temperature,
- the controller lowers the set temperature as long as the element temperature exceeds the allowable upper limit temperature, and
- the controller increases the set temperature as long as the element temperature falls below the allowable lower limit temperature.
Dependencies are inferred from the claim text.