Vapor deposition device, vapor deposition method, and method for manufacturing organic electroluminescence element

A vapor deposition device for performing vapor deposition while transporting a substrate in a first direction, the vapor deposition device comprising:

• a mask including a first end, a second end disposed on the side opposite to the first end, and a main surface provided with multiple openings for patterning;
• a substrate tray including a substrate-holding portion configured to hold a substrate and a guide portion protruding from the substrate-holding portion in the direction crossing a plane parallel to the substrate and disposed along the first direction;
• a transport guide configured to guide the substrate tray in the first direction such that the substrate-holding portion and the guide portion respectively face the main surface and the first end;
• at least one distance meter disposed on the first end or the guide portion;
• and
• at least one driver coupled with the second end,
• the at least one distance meter being configured to measure a distance between the at least one distance meter and the guide portion or the first end when the guide portion faces the first end,
• the at least one driver being capable of driving the mask in a second direction perpendicular to the first direction based on the measured value of the at least one distance meter.