Deposition mask, apparatus for manufacturing display apparatus, and method of manufacturing display apparatus
AssigneeSamsung Display Co., Ltd.
InventorSanghoon Kim
Life of this patent
Estimating the term…
Abstract
A deposition mask extending in a first direction may include: a pattern portion including a plurality of pattern holes; and a clamping portion including a protrusion portion to be attached to the clamp and an indentation portion formed in a direction toward the pattern portion, wherein the pattern portion may include a blocking portion that at least partially overlaps the protrusion portion in the first direction and has an area gradually decreasing in a second direction from the protrusion portion toward the indentation portion, the second direction crossing the first direction.
Claims6
A method of manufacturing a display apparatus, the method comprising:
- inserting a substrate and a mask frame assembly into an inside of a chamber;
- aligning the substrate and the mask frame assembly;
- and
- depositing, on the substrate, a depositing material ejected from a deposition source and passed through the mask frame assembly,
- wherein the mask frame assembly comprises:
- a frame comprising an opening at a center portion thereof;
- a deposition mask disposed on the frame facing the substrate, the deposition mask being installed on the frame while being extended in a first direction by a clamp attached to both ends of the deposition mask;
- and
- a support stick extending in a second direction crossing the first direction, covering a part of the deposition mask, and supporting the deposition mask, wherein the deposition mask comprises:
- a pattern portion comprising a plurality of pattern holes;
- and
- a clamping portion comprising a protrusion portion to be attached to the clamp and an indentation portion formed in a direction toward the pattern portion,
- wherein the pattern portion comprises a blocking portion that at least partially overlaps the protrusion portion in the first direction and has an area gradually decreasing in a second direction from the protrusion portion towards the indentation portion, the second direction crossing the first direction.
Dependencies are inferred from the claim text.