Piezoelectric device, piezoelectric vibrating piece, and method for manufacturing piezoelectric vibrating piece
AssigneeNihon Dempa Kogyo Co., Ltd.
InventorsTetsuya WATANABE, Hirokazu IWATA, Yoshiharu SATO
Life of this patent
Estimating the term…
Abstract
A piezoelectric device includes a piezoelectric vibrating piece and a container. The piezoelectric vibrating piece has a rectangular planar shape and has a portion of a first side secured to the container. The piezoelectric vibrating piece has a second side opposing the first side and includes a projecting portion that projects outward from the second side in at least one of proximity of both ends of the second side along the second side.
Claims9
A piezoelectric device comprising:
- a piezoelectric vibrating piece that has a rectangular planar shape;
- and
- a container, wherein
- the piezoelectric vibrating piece has a portion of a first side secured to the container,
- the piezoelectric vibrating piece has a second side opposing the first side, the piezoelectric vibrating piece comprises a projecting portion that projects outward from the second side in at least one of proximity of both ends of the second side along the second side.
A piezoelectric vibrating piece having a rectangular planar shape, comprising:
- a portion of a first side used as a securing portion to a container;
- a second side opposing the first side, wherein
- the piezoelectric vibrating piece comprises a projecting portion that projects outward from the second side in at least one of proximity of both ends of the second side along the second side.
A method for manufacturing a piezoelectric vibrating piece, wherein
- the piezoelectric vibrating piece has a rectangular planar shape, the piezoelectric vibrating piece has a portion of a first side as a securing portion to a container, the piezoelectric vibrating piece has a second side opposing the first side, the piezoelectric vibrating piece comprises a projecting portion that projects outward from the second side in at least one of proximity of both ends of the second side along the second side, the method comprises:
- defining a formation-scheduled region for the piezoelectric vibrating piece in a piezoelectric wafer in a matrix, wherein a direction perpendicular to the first side and the second side is defined as a first direction, and each of the formation-scheduled regions for the piezoelectric vibrating piece is arranged in the first direction;
- forming a pattern for photolithography such that a second side of one formation-scheduled region for the piezoelectric vibrating piece and a first side of another neighboring formation-scheduled region for the piezoelectric vibrating piece are connected in a formation-scheduled region for the projecting portion;
- and
- etching a portion other than the formation-scheduled region for the piezoelectric vibrating piece and the formation-scheduled region for the projecting portion of the piezoelectric wafer.
Dependencies are inferred from the claim text.