Piezoelectric driving device, piezoelectric motor, robot, electronic-component conveying apparatus, printer, and projector

A piezoelectric driving device comprising:

• a substrate;
• a first insulating film disposed above one surface of the substrate;
• a piezoelectric element for driving disposed above the first insulating film and configured to vibrate the substrate;
• a piezoelectric element for detection disposed above the first insulating film and configured to detect the vibration of the substrate;
• a wire for driving disposed above the first insulating film and electrically connected to the piezoelectric element for driving;
• a wire for detection disposed above the first insulating film and electrically connected to the piezoelectric element for detection;
• and
• a lower layer wire disposed between the first insulating film and the substrate and set to fixed potential, wherein at least one of the wire for driving and the wire for detection overlaps the lower layer wire in a plan view of the substrate.