Tft substrate, scanned antenna having tft substrate, and method for manufacturing tft substrate

A TFT substrate comprising:

• a dielectric substrate;
• a plurality of antenna element regions arranged on the dielectric substrate, wherein each of the plurality of antenna element regions includes a TFT and a patch electrode electrically connected to a drain electrode of the TFT;
• a transmitting/receiving region including the plurality of antenna element regions;
• a non-transmitting/receiving region located outside of the transmitting/receiving region;
• a source metal layer supported by the dielectric substrate and including a source electrode of the TFT, the drain electrode and a source bus line connected to the source electrode;
• a gate metal layer formed on the source metal layer and including a gate electrode of the TFT and a gate bus line connected to the gate electrode;
• a semiconductor layer of the TFT supported by the dielectric substrate;
• and
• a gate insulating layer formed between the semiconductor layer and the gate metal layer, wherein:
• the source metal layer further includes the patch electrode;
• the source metal layer further includes a source terminal portion arranged in the non-transmitting/receiving region;
• the source terminal portion includes:
• a source terminal lower connection portion included in the source metal layer and electrically connected to the source bus line;
• a first opening formed in the gate insulating layer and reaching the source terminal lower connection portion;
• and
• a source terminal upper connection portion connected to the source terminal lower connection portion in the first opening;
• and
• the gate metal layer further includes the source terminal upper connection portion.