Method of producing semiconductor device

A method of producing a semiconductor device, the method comprising steps of:

• (A) preparing a semiconductor epitaxial wafer which includes a semiconductor wafer, and a semiconductor layer disposed on a main surface of the semiconductor wafer, the semiconductor layer containing a first conductivity type impurity, the semiconductor epitaxial wafer including a plurality of device regions, each of which includes a body region of a second conductivity type in contact with the semiconductor layer, and a source region of the first conductivity type in contact with the body region;
• (B) forming a channel layer which is in contact with at least a part of the body region by epitaxial growth of a semiconductor on a surface of the semiconductor layer;
• and
• (C) forming a gate insulation film on the channel layer, wherein:
• the channel layer contains the first conductivity type impurity at a concentration ranging from 1×1018 cm−3 to 1×1019 cm−3, inclusive, and has a thickness ranging from 10 nm to 100 nm, inclusive, and
• in the steps of (B) and (C), a condition for the epitaxial growth and a condition for forming the gate insulation film are controlled so that, in a plane parallel to the main surface of the semiconductor wafer, a thickness distribution in the channel layer and a thickness distribution in the gate insulation film are positively correlated to each other.