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US 2019/0096850 A1Published application
Stacked package structure and manufacturing method thereof
AssigneeNanya Technology Corporation
InventorPo-Chun LIN
Life of this patent
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Abstract
A stacked package structure includes a first package structure having a first surface and a second surface opposite to the first surface. The first package structure includes a least one first die having a first active region disposed at a bottom of the first die; a first redistribution layer disposed on the top surface of the first die; and a plurality of first bumps disposed on the bottom surface of the first active region.
Claims7
A method for manufacturing a stacked package structure, comprising:
- forming a first package structure having a first surface and a second surface, comprising:
- forming a first release film on a first carrier substrate;
- forming a first redistribution layer on the first release film, wherein a bottom surface of the first redistribution layer serves as the first surface;
- attaching at least one first die on the first redistribution layer, wherein the first die has a first active region disposed on a side away from the first redistribution layer of the first die;
- forming a plurality of first bumps on the first die, wherein a part of the first bumps are electrically connected to the first active region;
- forming a plurality of first conductive features in the first die, wherein the first conductive features electrically connect the first redistribution layer to another part of the first bumps;
- and
- removing the first carrier substrate and the first release film.
5 more elements
Dependencies are inferred from the claim text.