Semiconductor structure and method of manufacturing the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPEI-HAW TSAO, AN-TAI XU, HUANG-TING HSIAO, KUO-CHIN CHANG
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPEI-HAW TSAO, AN-TAI XU, HUANG-TING HSIAO, KUO-CHIN CHANG
Estimating the term…
A method for fabricating a semiconductor structure is provided. The method includes: providing a semiconductor chip comprising an active surface; forming a conductive bump over the active surface of the semiconductor chip; and coupling the conductive bump to a substrate. The conductive bump includes a plurality of bump segments including a first group of bump segments and a second group of bump segments. Each bump segment has a same segment thickness in a direction orthogonal to the active surface of the semiconductor chip, and each bump segment has a volume defined by a multiplication of the same segment thickness with an average cross-sectional area of the bump segment in a plane parallel to the active surface of the semiconductor chip. A ratio of a total volume of the first group of bump segments to a total volume of the second group of bump segments is between 0.03 and 0.8.
A method for fabricating a semiconductor structure comprising:
A method for fabricating a semiconductor structure comprising:
A semiconductor structure, comprising:
Dependencies are inferred from the claim text.