Wafer support system, wafer support device, system comprising a wafer and a wafer support device as well as mask aligner

A mask aligner for aligning a mask and a wafer comprising a mask holder and a wafer support system for supporting a wafer comprising a wafer support device and a dicing frame,

• wherein the wafer support device has a bottom plate and a top plate arranged concentrically to each other,
• wherein the top plate comprises a support surface for supporting the wafer being the surface of the top plate facing away from the bottom plate,
• wherein the bottom plate has a maximum diameter being larger than the maximum diameter of the top plate so that the bottom plate comprises a shoulder around the top plate forming a repository for the dicing frame,
• wherein the dicing frame has a plate-like shape defining a center hole,
• wherein the minimum diameter of the center hole is larger than the maximum diameter of the top plate, and
• wherein the top plate is shaped such that it can extend through the center hole of the dicing frame so that the dicing frame lies in the repository, wherein the highest point of the dicing frame lies below at least one of the upper surface of the wafer and the support surface in a vertical direction when the wafer is mounted in the dicing frame and placed on top of the wafer support device.