Chamber for degassing substrates

A heater and/or cooler chamber for a batch of more than one workpieces, which are sheet-shaped, drum- skin like shaped in a frame, band or plate shaped having each a pair of two-dimensionally extended surfaces and a thickness D of

• 0.01 mm≤D≤5 mm,
• especially of such equal workpieces, thereby especially of substrates or wafers, all workpieces with structured or unstructured extended surfaces and single or multi-layered, especially a degasser heater-chamber for such a batch, comprising:
• a heat storage block or chunk made of one single metal piece or of more than one thermally narrowly coupled metal parts, thermally behaving in common only negligibly different from such equal single piece metal block or chunk;
• said block comprising more than one parallel and stacked slit-pockets stacked one upon the other, each dimensioned to accommodate a single of said workpieces therein and extending along a slit-pocket plane;
• in each of said slit-pockets a workpiece support for a workpiece;
• each slit-pocked having at least one workpiece handling opening;
• each slit-pocket being tailored to surround one of said workpieces, applied on its workpiece support, in a noncontact manner, the height h of each of said slit-pockets, perpendicular to said slit-pocket planes and along not less than 30% of the extent surface area of said slit-pockets, considered parallel to said slit-pocket planes being:
• 2.5 mm≤h≤50 mm
• the at least one workpiece handling openings of said slit-pockets being operatively connected to a door arrangement controllably freeing and covering the respective workpiece handling openings with respect to an atmosphere outside said block;
• at least one heater and/or cooler interface to said block.